BERNHARD BOSER
Professor,
Department of Electrical Engineering and Computer Sciences
University of California, Berkeley
Resonant Force Sensing for 0.1-me , 10-kHz Strain Sensor
ABSTRACT: Resonant force sensors have long been used in precision gyroscopes and balances. This presentation describes the design of such a device for strain measurements. Focus is on the optimization of resonator Q and amplitude for maximum dynamic range and resolution. A sustaining loop permitting oscillation in atmospheric pressure and with very large motional impedance and parasitic is described. The measured resolution of the device is 33-ne in a 10-kHz bandwidth with only 200-mm gauge length. Spot noise is 40-pe / rt-Hz at 100-Hz.
BIO: Prof. Bernhard E. Boser received the Diploma in Electrical Engineering from the Swiss Federal Institute of Technology in 1984 and the M.S. and Ph.D. from Stanford University in 1985 and 1988. From 1988 he was a Member of Technical Staff in the Adaptive Systems Department at AT&T Bell Laboratories. In 1992 he joined the faculty in the Department of Electrical Engineering and Computer Sciences at the University of California, Berkeley where he also serves as a Director of the Berkeley Sensor & Actuator Center. Dr. Boser's research is in the area of analog and mixed signal circuits, with special emphasis on analog-digital interface circuits and micromechanical sensors and actuators. He has served on the program committees of the International Solid-State Circuits Conference, the Transducers Conference, the VLSI Symposium, the Sensor and Actuator Workshop, and was the Editor of the IEEE Journal of Solid-State Circuits. Dr. Boser is a Fellow of the IEEE. He is the Chief Scientist of SiTime, a fabless semiconductor company he co-founded in 2004.
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